ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology

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ULSI Front-End Technology: Covering from the First Semiconductor Paper to CMOS FINFET Technology

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內容描述

The main focus of this book is ULSI front-end technology. It covers from the early history of semiconductor science & technology from 1874 to state-of-the-art FINFET technology in 2016. Some ULSI back-end technology is also covered, for example, the science and technology of MIM capacitors for analog CMOS has been included in this book.